Acuity MEMS Pressure Sensors

 
 
Very Low Pressure Sensor AC3050 Die
 AC4080 Amplifed Pressure Sensor
Low Pressure AC3030 Wafer
 
Acuity Products:

    Acuity Sensor Die

    Medium Pressure (5 PSI to 300 PSI - 0.35 bar to 20 bar)

    Part
    Die
    Pressure Ranges (PSI)
    Typical Output
    Features
    5
    15
    30
    50
    100
    150
    300

    AC3010

    3.6 kohm

    AC3010 Series Die
    X
    X
    X
    X
    X
    X
    X
    125 mV
    		 • 3.6 kohm bridge impedance
    • Available in Gauge or Absolute

    • 5 to 300 PSI Full-Scale Ranges

    • 1.6 X 1.8 mm Die
    • High Accuracy, High Zero Stability

    AC3012

    5 kohm
    AC3012 Pad Layout
    X
    X
    X
    X
    X
    X
    X
    125 mV
    		• 5.0 kohm bridge impedance
    • Available in Gauge or Absolute

    • 5 to 300 PSI Full-Scale Ranges

    • 1.6 X 1.8 mm Die
    • High Accuracy, High Zero Stability
        X = Planned Ranges

     

     

    Low Pressure (0.03 to 7.5 PSI - 2 mbar to 500 mbar)

    Part
    Die
    Pressure Ranges (mBar)
    Typical Output
    Features
    1.0
    2.5
    		5.0
    10
    20
    50
    100
    200
    500
    AC3030 Die
    X
    X
    X
    X
    x
    50 mV

    • 20 to 500 mBar Full-Scale Ranges

    • 1.6 X 1.6 mm Die
    • High Accuracy, High Zero Stability
    AC3031 Die
    X
    X
    50 mV
    		 • Identical to the AC3030 in performance but with a metal pattern that allows all wirebonds to be done on one side.
    • 20 and 50 mBar Full-Scale Ranges, standard.
    • High Accuracy, High Zero Stability
    AC3050 Die
    X
    50 mV

    • 10 mBar Full-Scale Range
    • 1.9 X 1.9 mm Die
    • High Accuracy, High Zero Stability
    AC3055 Die
    X
    45 mV
    		• 10 mBar Full-Scale Range
    • 1.9 X 1.9 mm Die
    • High Accuracy, High Zero Stability with enhanced linearity over AC3050

    AC3070

     
    AC3070 Die
    X
    18 mV
    		• 2 mBar Full-Scale Range
    • 2.4 X 2.4 mm Die

    • High Accuracy, High Zero Stability
        X = Available Ranges

     

 

  
Acuity Incorporated
Fremont, CA, USA 94539
Phone: +1-510-573-0738
FAX: +1-510-573-3704
 
www.acuitymicro.com
  
 
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